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Radiation charging and breakdowns of insulators

✍ Scribed by D.K. Davies


Book ID
103680019
Publisher
Elsevier Science
Year
1987
Tongue
French
Weight
461 KB
Volume
20
Category
Article
ISSN
0304-3886

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Injection induced charging of HfO2 insul
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Charge trapping in HfO 2 films on Si(1 0 0) was studied using generation of electron-hole pairs in the oxide by 10 eV photons. The oxide deposition chemistry strongly influences the density and sign of the trapped charge: positive charge is observed in films obtained from HfCl 4 and metallo-organics