IR characterization of hydrogen in cryst
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M. Stavola; S. Kleekajai; L. Wen; C. Peng; V. Yelundur; A. Rohatgi; L. Carnel; J
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Article
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2009
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Elsevier Science
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English
β 333 KB
Hydrogen is commonly introduced into silicon solar cells to reduce the deleterious effects of defects and to increase cell efficiency. A process that is widely used by industry to introduce hydrogen is by the post-deposition annealing of a hydrogen-rich SiN x layer that is used as an anti-reflection