DLTS properties of iron defects in crystalline silicon used in solar cells
β Scribed by H. Hamadeh; R. Darwich
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 111 KB
- Volume
- 113
- Category
- Article
- ISSN
- 0921-5107
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Hydrogen is commonly introduced into silicon solar cells to reduce the deleterious effects of defects and to increase cell efficiency. A process that is widely used by industry to introduce hydrogen is by the post-deposition annealing of a hydrogen-rich SiN x layer that is used as an anti-reflection
High resolution Laplace deep level transient spectroscopy (LDLTS) has been applied to investigate the annealing behaviour of small cluster defects in n-type Si. The Si was implanted with either Ge or Si, with energies 1500 keV and 850 keV respectively, and doses of 1 β’ 10 10 cm Γ2 . The low dose ens