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“Quantum - size effect” in Mo/Si multilayers

✍ Scribed by V.Yu. Kushirin; N.Ya. Fogel; V.G. Cherkasova; E.I. Buchstab; S.A. Yulin

Book ID
103938574
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
164 KB
Volume
194-196
Category
Article
ISSN
0921-4526

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## Abstract Combined approach based on X‐ray reflectometry (XRR), atomic‐force microscopy (AFM), and small‐angle X‐ray scattering (SAXS) has been applied to two series of multilayer Mo/Si mirrors grown by magnetron sputtering on standard and specially smoothed substrates under different technologic