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Quantitative X-ray analysis

โœ Scribed by A. Pape; J.C. Sens; P. Fintz; A. Gallmann; H.E. Gove; G. Guillaume; D.M. Stupin


Publisher
Elsevier Science
Year
1972
Weight
84 KB
Volume
105
Category
Article
ISSN
0029-554X

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Error factors in quantitative total refl
โœ Yoshihiro Mori; Kenichi Uemura ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 116 KB ๐Ÿ‘ 1 views

This paper reviews and discusses the error factors in quantitative total reflection x-ray fluorescence analysis, primarily with regard to the surface contamination of silicon wafers. The error factors were classified into three origins: instrumental, sample and data processing. The instrumental erro