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Quantitative Structure and Property Analysis of Nanoporous Low Dielectric Constant SiCOH Thin Films

✍ Scribed by Heo, K.; Park, S.-G.; Yoon, J.; Jin, K.S.; Jin, S.; Rhee, S.-W.; Ree, M.

Book ID: 126436161
Publisher: American Chemical Society
Year: 2007
Tongue: English
Weight: 367 KB
Volume: 111
Category: Article
ISSN: 1932-7447
DOI: 10.1021/jp072125x

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