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Quantitative Rutherford backscattering spectrometry in-depth composition analysis of sputtered TaSi2 layers

✍ Scribed by J. Schulte; R. Ferretti; W. Hasse; Y. Danto; Y. Ousten


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
295 KB
Volume
140
Category
Article
ISSN
0040-6090

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