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Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation

โœ Scribed by Murata, Kenji; Kotera, Masatoshi; Nagami, Koichi

Book ID
121324287
Publisher
American Institute of Physics
Year
1983
Tongue
English
Weight
536 KB
Volume
54
Category
Article
ISSN
0021-8979

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โœ Wei Helin; Liu Zuli; Yao Kailun ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 159 KB

The thin-film growth process on a triangular lattice surface is studied by a Monte Carlo simulation (MCS). Four kinetic processes are considered: atom deposition, adatom diffusion, adatom nucleation and adatom reevaporation. We pay close attention to the substrate temperature and the interaction bet