✦ LIBER ✦
Monte Carlo simulation of electron-beam exposure distributions in the resist on structures with high-Tc superconducting thin films
✍ Scribed by J. Georgiev; G. Mladenov; D. Ivanov
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 393 KB
- Volume
- 251
- Category
- Article
- ISSN
- 0040-6090
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