Anodic alumina Γlms with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth proΓling analysis to quantify depth resolution. It is evident that the depth resolution of GDOES is excellent and is comparable wi
Quantitative depth profiling by glow discharge mass spectrometry
β Scribed by D. J. Hall; N. E. Sanderson
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Weight
- 399 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0142-2421
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