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Quantitative 3D reconstruction from BS imaging

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
908 KB
Volume
44
Category
Article
ISSN
0026-2714

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โœฆ Synopsis

The well known technique for separately enhancing topographic and compositional contrast in BS images has been refined. The underlying quantitative theory has been developed, both for acquisition and processing, and tested first in the optical field. The surprisingly good results moved to return to the SEM and to transfer the whole procedure from light to Back Scattered electron images. The preliminary results strongly address for future developments, even for microelectronics, pointing towards FEG SEM operation.

ยฉ 2004 Elsevier Ltd. All rights reserved.

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