Quantifying delineation errors in thin film resistors II: Evaluation of etching rates from resistance measurements

✍ Scribed by A. Peled; R. Peled

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 188 KB
• Volume: 106
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(83)90477-7