Quantifying delineation errors in thin film resistors I: Evaluation of linewidth errors from resistance measurements

✍ Scribed by A. Peled; M. Haspel

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 197 KB
• Volume: 93
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(82)90151-1