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Quantification of a Ti(CxN1−x) based multilayer by Auger Electron Spectroscopy

✍ Scribed by J. Guillot; T. Wirtz; T. Girot; M. Penoy; H.N. Migeon; G. Barbier


Book ID
108064133
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
435 KB
Volume
256
Category
Article
ISSN
0169-4332

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