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Quality Control and Electrical Properties of Thin Amorphous (SiC)1-x(AlN)x Films Produced by Radio Frequency Dual Magnetron Sputtering

✍ Scribed by Gálvez de la Puente, G.; Erlenbach, Oliver; Guerra, Jorge Andres; Hupfer, T.; Steidl, M.; De Zela, Francisco; Weingärtner, Roland; Winnacker, Albrecht

Book ID: 121863656
Publisher: Trans Tech Publications, Ltd.
Year: 2010
Tongue: English
Weight: 441 KB
Volume: 645-648
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.645-648.1199

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