✦ LIBER ✦

Quadrupole interactions of fluorine at implantation sites in germanium and silicon

✍ Scribed by K. Bonde Nielsen; T. Lauritsen; G. Weyer; H. K. Schou; P. T. Nielsen

Book ID: 112705113
Publisher: Springer
Year: 1983
Tongue: English
Weight: 184 KB
Volume: 15
Category: Article
ISSN: 0304-3843
DOI: 10.1007/bf02159798

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Suppression of boron transient enhanced

Suppression of boron transient enhanced diffusion in silicon and silicon germanium by fluorine implantation

✍ H.A.W. El Mubarek; Y. Wang; R. Price; J.M. Bonar; J. Zhang; P.L.F. Hemment; P. A 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 474 KB

Reduction of Boron Diffusion in Silicon&

Reduction of Boron Diffusion in Silicon–Germanium by Fluorine Implantation

✍ H. Elmubarek; P. Ashburn 📂 Article 📅 2004 🏛 IEEE 🌐 English ⚖ 133 KB

Interaction between implanted fluorine a

Interaction between implanted fluorine atoms and point defects in preamorphized silicon

✍ G. Impellizzeri; J.H.R. dos Santos; S. Mirabella; E. Napolitani; A. Carnera; F. 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 217 KB

We have studied, by means of B diffusion analyses, the effect of F on the point defect density in preamorphized Si. Through molecular beam epitaxy (MBE) Si samples containing a special B multi-spike were grown. These samples were amorphized to a depth of 550 nm by implanting Si at liquid nitrogen te

Theory of location and quadrupole intera

Theory of location and quadrupole interactions of19F*in silicon

✍ S. B. Sulaiman; N. Sahoo; K. C. Mishra; T. P. Das; K. Bonde Nielsen 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 290 KB

Investigation of electronic structure an

Investigation of electronic structure and associated nuclear quadrupole interaction of adsorbed fluorine atoms on silicon surface

✍ K. C. Mishra; B. N. Dev; S. M. Mohapatra; W. M. Gibson; T. P. Das 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 216 KB

Effect of Fluorine Co-Implant on Boron D

Effect of Fluorine Co-Implant on Boron Diffusion in Germanium Preamorphized Silicon During Post-LSA Rapid Thermal Annealing

✍ Chyiu Hyia Poon; See, A. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 321 KB