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PYROELECTRIC AND THERMAL STRAIN EFFECTS OF PIEZOELECTRIC (PVDF AND PZT) DEVICES

✍ Scribed by H.S. Tzou; R. Ye

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
273 KB
Volume
10
Category
Article
ISSN
0888-3270

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Thermal effects in PZT: diffusion of tit
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✍ Ching-Liang Dai; Fu-Yuan Xiao; Chi-Yuan Lee; Ying-Chou Cheng; Pei-Zen Chang; Shu πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 531 KB

This paper shows temperature dependent hillocks and cracks on the piezoelectric thin film lead-zirconate-titanate (PZT). The PZT thin film is deposited on Pt/Ti/SiO 2 /Si substrate by metal organic decomposition (MOD) where platinum is a bottom electrode and titanium is an adhesive layer. Experiment