Pumping speed measurement on sputter-ion pumps

✍ Scribed by SL Rutherford

• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 389 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(96)90022-6

✦ Synopsis

The two gauge calibrated conductance method has been used extensively to measure pumping speeds of sputter-ion pumps in the pressure range 10 -4 to 10 -s torr. Results obtained with large variations in the size of pump and measuring equipment are repeatable within 5 per cent and compare with the results obtained from flow measurement methods using a single calibrated gauge. Changes in test gas pressure and composition produce transient effects, and experimental safeguards are described to eliminate incorrect data arising from non-equilibrium conditions. Reference is made to the significance of the discharge intensity I /P as a quantity proportional to pumping speed which enables pumping speed measurements at pressures below 10 "a torr to be more quickly carried out.