Pumping speed measurement on sputter-ion
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SL Rutherford
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Article
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1966
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Elsevier Science
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English
β 389 KB
The two gauge calibrated conductance method has been used extensively to measure pumping speeds of sputter-ion pumps in the pressure range 10 -4 to 10 -s torr. Results obtained with large variations in the size of pump and measuring equipment are repeatable within 5 per cent and compare with the res