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Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

✍ Scribed by J.M. Lackner; W. Waldhauser; R. Ebner; M. Beutl; G. Jakopic; G. Leising; H. Hutter; M. Rosner

No coin nor oath required. For personal study only.

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