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Deposition of stoichiometric MoS2 thin films by pulsed laser evaporation

✍ Scribed by M.S. Donley; N.T. McDevitt; T.W. Haas; P.T. Murray; J.T. Grant


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
514 KB
Volume
168
Category
Article
ISSN
0040-6090

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A pulsed Nd:YAG Laser was used to evaporate solid targets of KTiOAsO 4 (KTA) at power densities of 0.6 to 2.0Γ—10 9 W/cm 2 . KTA thin films were deposited on glass, Si (100). After proper annealing treatment, single phase, (orthorh-ombic) polycrystalline KTA thin films were obtained. Some propitious