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Pulsed laser crystallization of silicon–germanium films

✍ Scribed by T. Sameshima; H. Watakabe; H. Kanno; T. Sadoh; M. Miyao

Book ID: 108287797
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 258 KB
Volume: 487
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.01.037

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