Local crystal structural modifications in pulsed laser deposited high-k dielectric thin films on silicon and germanium

✍ Scribed by Mehmet Alper Sahiner; Joseph C. Woicik; Timothy Kurp; Jeffrey Serfass; Marc Aranguren

• Book ID: 103846647
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 382 KB
• Volume: 11
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2008.08.003