✦ LIBER ✦

Pulsed inductively coupled plasmas as a method to recoup uniformity: Three-dimensional modeling study

✍ Scribed by Subramonium, Pramod; Kushner, Mark J.

Book ID: 121343739
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 530 KB
Volume: 85
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1776617

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A three-dimensional model for inductivel

A three-dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments

✍ Kushner, Mark J.; Collison, Wenli Z.; Grapperhaus, Michael J.; Holland, John P.; 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 473 KB