✦ LIBER ✦
A three-dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments
✍ Scribed by Kushner, Mark J.; Collison, Wenli Z.; Grapperhaus, Michael J.; Holland, John P.; Barnes, Michael S.
- Book ID
- 121331795
- Publisher
- American Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 473 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.362932
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