Pulsed electron beam for silicon annealing: G Leggieri et al, Vacuum, 32 (1), 1982, 9–10

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 173 KB
• Volume: 33
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(83)90194-x