𝔖 Bobbio Scriptorium

✦ LIBER ✦

Pulsed electron beam annealing of arsenic-implanted silicon: Y Yamamoto et al, J Appl Phys, 53 (1), 1982, 276–283

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 350 KB
Volume: 33
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(83)90748-0

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