๐”– Bobbio Scriptorium
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Pulsed Electron Beam Dosimetry

โœ Scribed by Oswald, R. B.; Eisen, H. A.; Conrad, E. E.


Book ID
117930276
Publisher
IEEE
Year
1966
Tongue
English
Weight
960 KB
Volume
13
Category
Article
ISSN
0018-9499

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The characteristics of an electron beam generator are given. It produces pulses up to 50 kV. currents up to 20 kA, with a pulse length of about 50 ns. It was designed and built for annealing of thin metal layers deposited on single crystal silicon wafers.