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Pulse implantation doping - concentration profiles and surface morphology

✍ Scribed by Jerzy Piekoszewski; Zbigniew Werner; Jerzy Langner; Leszek Jakubowski; Cezary Pochrybniak; Agnieszka Harasiewicz

Publisher: Elsevier Science
Year: 1983
Weight: 440 KB
Volume: 209-210
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(83)90841-4

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