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Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

✍ Scribed by Daniel Fernández; Jordi Madrenas; Manuel Domínguez; Joan Pons; Jordi Ricart

Publisher: Springer
Year: 2008
Tongue: English
Weight: 702 KB
Volume: 57
Category: Article
ISSN: 0925-1030
DOI: 10.1007/s10470-008-9166-9

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