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Pull-in experiments on electrostatically actuated microfabricated meso scale beams

✍ Scribed by Gerson, Y.; Sokolov, I.; Nachmias, T.; Ilic, B.R.; Lulinsky, S.; Krylov, S.

Book ID: 120404322
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 663 KB
Volume: 199
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2013.05.013

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