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PtSi/n-type Si Schottky barrier height change by H+ ion implantation near the interface region

✍ Scribed by P. Hadizad; A.S. Yapsir; T.-M. Lu; J.C. Corelli; A. Sugerman

Book ID: 114168102
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 254 KB
Volume: 19-20
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(87)80085-x

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