✦ LIBER ✦

Prospects for x-ray fabrication of si ic devices

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical versus X-ray lithography for fut

✍ Wolfgang Arden 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 563 KB

The development of milliKelvin Si bolome

✍ C.C. Zammit; T.J. Sumner; I.D. Hepburn; P.A.R. Ade 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 335 KB

Fabrication and properties of polycrysta

✍ Chaudhry, M. I.; Wright, R. L. 📂 Article 📅 1991 🏛 American Institute of Physics 🌐 English ⚖ 736 KB

Fabrication of high precision X-ray mask

✍ Daiji Noda; Hiroshi Tsujii; Naoki Takahashi; Tadashi Hattori 📂 Article 📅 2010 🏛 Springer-Verlag 🌐 English ⚖ 449 KB

Effects of X-ray lithography and irradia

✍ P.K. Bhattacharya 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 785 KB

On the compatibility of X-ray lithograph

✍ Galloway, K.F.; Mayo, S. 📂 Article 📅 1978 🏛 IEEE 🌐 English ⚖ 280 KB