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Effects of X-ray lithography and irradiation damage on Si-devices

✍ Scribed by P.K. Bhattacharya

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
785 KB
Volume
48
Category
Article
ISSN
0969-806X

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The effects of short duration irradiation with low dose rate gamma and beta rays on the input resistance and the output Hall voltage of InSb, GaAs, Si, and Ge semiconductor Hall effect devices were systemically studied. Both gamma and beta irradiation can cause the input resistance of Hall effect de