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Properties of ZrNx films with x > 1 deposited by reactive radiofrequency magnetron sputtering

✍ Scribed by A. Rizzo; M.A. Signore; L. Mirenghi; E. Serra

Book ID: 108289368
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 515 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.03.020

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