Properties of tungsten oxide thin films formed by ion-plasma and laser deposition methods for MOSiC-based hydrogen sensors

✍ Scribed by V. Y. Fominski; S. N. Grigoriev; R. I. Romanov; V. V. Zuev; V. V. Grigoriev

• Book ID: 114992372
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 925 KB
• Volume: 46
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782612030098