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Properties of titanium solid solutions prepared by reactive sputtering

โœ Scribed by H. Mitsuhashi; Y. Igasaki; M. Kaneko


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
392 KB
Volume
45
Category
Article
ISSN
0022-0248

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Electrical and structural properties of
โœ K.P.S.S. Hembram; Gargi Dutta; Umesh V. Waghmare; G. Mohan Rao ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 819 KB

Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp