Titanium isopropoxide as a precursor for
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Jaan Aarik; Aleks Aidla; Teet Uustare; Mikko Ritala; Markku LeskelΓ€
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Article
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2000
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Elsevier Science
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English
β 208 KB
Atomic layer deposition ALD of titanium oxide from titanium isopropoxide Ti OCH CH and water as well as 3 2 4 Ε½ Ε½ . . Ε½ . from Ti OCH CH and hydrogen peroxide H O was studied. According to data of real-time quartz crystal 3 2 4 2 2 Ε½ . Ε½ Ε½ . . microbalance QCM measurements, adsorption of Ti OCH CH w