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Properties of the fluorinated coatings based on carbon prepared by RF-magnetron deposition

✍ Scribed by Sleptsov, V.V.; Elinson, V.M.; Simakina, N.V.; Uksusov, A.S.

Book ID
122812231
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
169 KB
Volume
1
Category
Article
ISSN
0925-9635

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## Carbon-containing tungsten coatings were deposited by magnetron sputtering onto AISI 316 stainless steel substrates in A&H, gas mixtures. Optical emission spectroscopy was used to control the C,H, gas flow. The goal of this investigation was to study the influence of the carbon content in W,_,C,