𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Properties of sputtered amorphous and microcrystalline GaAs films

✍ Scribed by H. Reuter; H. Schmitt; M. Böffgen

Book ID
107864382
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
673 KB
Volume
254
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Amorphous and microcrystalline GeC:H fil
Amorphous and microcrystalline GeC:H films prepared by magnetron sputtering
✍ Saito, N. ;Iwata, H. ;Nakaaki, I. ;Nishioka, K. 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 405 KB

## Abstract Hydrogenated germanium‐carbon alloy (GeC:H) films have been deposited by a reactive rf magnetron sputtering of Ge in methane–argon gas mixtures. As the second sputtering gas, helium is utilized in order to control the film properties. The effect of helium partial pressure ratio __R__ to