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Properties of SiO 2 electret films charged by ion implantation for MEMS-based energy harvesting systems

✍ Scribed by Mescheder, U; Müller, B; Baborie, S; Urbanovic, P

Book ID
120041485
Publisher
Institute of Physics
Year
2009
Tongue
English
Weight
539 KB
Volume
19
Category
Article
ISSN
0960-1317

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