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Properties of multilayer gallium and aluminum doped ZnO(GZO/AZO) transparent thin films deposited by pulsed laser deposition process

✍ Scribed by Jin-Hyun SHIN; Dong-Kyun SHIN; Hee-Young LEE; Jai-Yeoul LEE

Book ID: 117694684
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 374 KB
Volume: 21
Category: Article
ISSN: 1003-6326
DOI: 10.1016/s1003-6326(11)61069-8

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## Abstract InAs co‐doped ZnO films were grown on sapphire substrates by pulsed laser deposition. The grown films have been characterized using X‐ray diffraction (XRD), Hall effect measurements, Atomic force microscope (AFM) and Field emission scanning electron microscope (FESEM) in order to invest