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Properties of ITO films deposited by plasma enhanced RTE on unheated polymer sheets – dependence on rf electrode distance from substrates

✍ Scribed by C. Nunes de Carvalho; G. Lavareda; E. Fortunato; A. Amaral

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ITO films deposited by rf-PERTE on unhea

✍ C Nunes de Carvalho; G Lavareda; E Fortunato; P Vilarinho; A Amaral 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 231 KB

Effect of rf power on the properties of

✍ C Nunes de Carvalho; A Luis; O Conde; E Fortunato; G Lavareda; A Amaral 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 509 KB