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Properties of interconnection on silicon, sapphire, and semi-insulating gallium arsenide substrates

✍ Scribed by Han-Tzong Yuan; Yung-Tao Lin; Shang-Yi Chiang


Book ID
114594068
Publisher
IEEE
Year
1982
Tongue
English
Weight
692 KB
Volume
29
Category
Article
ISSN
0018-9383

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πŸ“œ SIMILAR VOLUMES


Chemical vapor deposition of Ξ²-SiC on si
✍ J.C. Pazik; G. Kelner; N. Bottka; J.A. Freitas Jr. πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 381 KB

Cubic silicon carbide (t-SiC) films have been grown epitaxially on silicon-on-sapphire (SOS) substrates by chemical vapor deposition. A fresh layer of silicon is first deposited in situ on the SOS substrate at approximately 1050 Β°C. The silicon layer is then carbonized while being heated to 1360 Β°C.