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Properties of Insulating Thin Films Deposited by RF Sputtering

✍ Scribed by W. A. Pliskin; P. D. Davidse; H. S. Lehman; L. I. Maissel

Book ID: 126760289
Publisher: IBM
Year: 1967
Tongue: English
Weight: 427 KB
Volume: 11
Category: Article
ISSN: 0018-8646
DOI: 10.1147/rd.114.0461

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