Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications

✍ Scribed by Kang, M.C.; Tak, H.S.; Jeong, Y.K.; Lee, H.W.; Kim, J.S.

• Book ID: 121381252
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 708 KB
• Volume: 19
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2010.02.002