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Properties and phase transition of (Ti,Al)N thin films prepared by ion beam-assisted deposition

โœ Scribed by P. Budzynski; J. Sielanko; Z. Surowiec


Book ID
116574506
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
830 KB
Volume
16
Category
Article
ISSN
0966-9795

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