Properties and characteristics of Al-films deposited in dc and rf magnetron systems: AR Nyaiesh and L Holland, Vacuum, 32 (10/11), 1982, 661–664

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 144 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90436-1