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Progress in monitoring thin film thickness by use of quartz crystals

✍ Scribed by E. Benes; M. Schmid; G. Thorn

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 392 KB
Volume: 174
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90907-3

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