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Factors influencing the accuracy of a quartz-crystal-oscillator as a thickness monitor for thin film deposition

✍ Scribed by H.K. Pulker

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

2.23 Experimental determination of the t

✍ HK Pulker 📂 Article 📅 1967 🏛 Elsevier Science 🌐 English ⚖ 158 KB

Thin epitaxial Si films as a passivation

✍ F.E. Leys; R. Bonzom; B. Kaczer; T. Janssens; W. Vandervorst; B. De Jaeger; J. V 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 378 KB